Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer - ScienceDirect
A comparison of MEMS and electret condenser microphones
Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask - ScienceDirect
STMicroelectronics and DSP brings intelligence to MEMS Microphones - Israel Electronics News
Micromachines | Free Full-Text | A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions